发明名称 A POSITIONG APPARATUS, A SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FIXING A REFERENCE MEMBER
摘要 <p>Provided is a positioning apparatus including: a reference member that is serving as a reference for positioning; a support part that supports the reference member; and a first fixing member provided on the support part that fixes the reference member and the support part or releases the fixing. The reference member is connected to the support part in a movable state and fixed to the support part by the first fixing member after a position is determined. The reference member of the positioning apparatus is precisely installed to a reference position.</p>
申请公布号 KR101423811(B1) 申请公布日期 2014.07.25
申请号 KR20110030723 申请日期 2011.04.04
申请人 发明人
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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