发明名称 A VACUUN CLEAN ROLLER
摘要 The present invention relates to a vacuum cleaning roller and, more specifically, to a vacuum cleaning roller, which has a hollow circular vacuum path formed in the inside, and has a plurality of holes from an inner circumference of the vacuum path to an outer circumference thereof, and can remove contaminants from the outer circumference to the inner circumference by a vacuum state of the vacuum path through the holes. Like this, the vacuum cleaning roller of the present invention has the hollow circular vacuum path (1) formed in the inside, and the holes (2) formed from the inner circumference to the outer circumference of the vacuum path (1). The contaminants on a surface of a byproduct (20) is moved from the outer circumference to the inner circumference of the vacuum path (1) through the holes (2) by the vacuum state of the vacuum path.
申请公布号 KR101423666(B1) 申请公布日期 2014.07.25
申请号 KR20140047549 申请日期 2014.04.21
申请人 SUPER-SEMICON CO., LTD.;PHOS ENGINEERING CO., LTD. 发明人 SHIN, WOO CHANG;PARK, MOON SOO
分类号 H01L21/304 主分类号 H01L21/304
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