| 摘要 |
The present invention relates to a three-dimensional (3D) shape measuring device by applying the amplitude of a projection grating, which comprises: a pattern projecting unit which projects a pattern of a projection grating having a consistent cycle onto object to be measured; an image obtaining unit including an image sensor which obtains a pattern image projected onto the object to be measured; a focus position transferring unit which adjusts the focus position of the pattern projecting unit and the image obtaining unit in order to obtain a clear image of the projection grating pattern projected onto the object to be measured; a position sensor which detects the focus position transfer amount; a control unit which is inputted with the pattern image of the projection grating obtained from the image sensor and with a signal of the position sensor for detecting the focus position transfer amount; and a calculating unit which calculates the height of the object to be measured by calculating the image of the image sensor inputted in the control unit and the position input signal inputted from the position sensor. The focus position transferring unit regulates the focus of the projection grating pattern as operating the object to be measured in an X-axis and a Y-axis direction at the same time. At the same time, the focus position transferring unit obtains the projection grating pattern corresponding to one cycle, and obtains 3D information on the object to be measured by calculating the amplitude of the obtained projection grating pattern. [Reference numerals] (2110) Light source drive; (2520) Position sensor; (2530) Motor drive; (2550) Motor; (2600) Image sensor; (2610) Image board; (3400) Calculating unit, Control unit, Display unit |
