CASCADED PLASMA REACTOR

摘要

Embodiments relate to a plasma reactor including two or more sub-plasma reactors connected in series to generate an increased amount or increase the reactivity of radicals and reactive species. The two sub-plasma reactors may be of the same type or a different type. The plasma reactor including two or more sub-plasma reactors connected in series is advantageous, among other reasons, because smaller space is used compared to having multiple plasma reactors placed on tandem.

主权项

1. A remote plasma reactor comprising:
a first sub-plasma reactor formed with a first chamber configured to generate a first excited gas comprising radicals or reactive species by exciting a gas injected into the first chamber; and a second sub-plasma reactor communicating with the first sub-plasma reactor to receive the first excited gas, the second sub-plasma reactor formed with a second chamber and configured to generate a second excited gas that is more reactive or more excited than the first excited gas, the second sub-plasma reactor configured to inject the second excited gas onto a substrate.