| 发明名称 |
ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD |
| 摘要 |
An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive material located on the electrode, and a dielectric portion (22) formed from a dielectric material located on the resistive portion. |
| 申请公布号 |
WO2013160026(A3) |
申请公布日期 |
2014.07.24 |
| 申请号 |
WO2013EP55662 |
申请日期 |
2013.03.19 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
WILKLOW, RONALD;SCHMITZ, ROGER;NOTENBOOM, ARNOUD;WILL, MANON, ELISE |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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