Micro-electromechanical angle/slant sensor for use as acceleration sensor for e.g. microphone, has micro-electromechanical chip provided on printed circuit board, where interruptions perform thermal and mechanical decoupling of chip

摘要

The sensor has a micro-electromechanical (MEMS) chip (1) provided on a printed circuit board (2). A heating element (3) maintains moderate temperature of the MEMS chip, and is located on the MEMS chip and a side of the circuit board. Interruptions (4) perform thermal and mechanical decoupling of the MEMS chip and direct heat flow between the MEMS chip and the heating element. A cooling element i.e. Peltier element, is provided in the circuit board. The MEMS chip is a three-dimensional acceleration sensor ADXL 326 of firm analog devices (IC1).