发明名称 CHIP PACKAGE COMPRISING A MICROPHONE STRUCTURE AND A METHOD OF MANUFACTURING THE SAME
摘要 In various embodiments, a method for manufacturing a chip package is provided. The method includes arranging a chip over a substrate, the chip including a microphone structure and an opening to the microphone structure; and encapsulating the chip with encapsulation material such that the opening is kept at least partially free from the encapsulation material.
申请公布号 US2014203380(A1) 申请公布日期 2014.07.24
申请号 US201313747499 申请日期 2013.01.23
申请人 INFINEON TECHNOLOGIES AG 发明人 Theuss Horst
分类号 B81C1/00;B81B3/00 主分类号 B81C1/00
代理机构 代理人
主权项 1. A method for manufacturing a chip package, the method comprising: arranging a chip over a substrate, the chip comprising a microphone structure and an opening to the microphone structure; forming a spacer structure around the microphone structure; and encapsulating the chip with encapsulation material; wherein the spacer structure is configured to keep the opening at least partially free from the encapsulation material.
地址 Neubiberg DE