主权项 |
1. A high purity water delivery system comprising:
a reservoir (40) of purified water; a distribution line (42) extending downstream from an outlet (44) of the reservoir to a return (46) of the reservoir; and a plurality of delivery stations, each comprising:
an outlet (54′);a diverter (102; 102′; 102″; 102″') having:
an upstream inlet port (104) along the distribution line;a downstream outlet port (106) along the distribution line;a supply port (108) downstream of the inlet port;a return port (110) downstream of the supply port; anda flow restriction (112; 112′; 216) between the supply port and return port; anda flow control valve (56′) between: the outlet; and the supply port and the return port. |