发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 Provided are a semiconductor device and a manufacturing method thereof. The device comprises: a fin structure formed on a substrate (1000); an isolating layer (1006) formed on the substrate, wherein a part of the fin structure is exposed out of the isolating layer (1006), and the exposed part of the fin structure serves as a fin (1004) of the semiconductor device; and a gate stack formed on the isolating layer (1006) and intersecting the fin (1004), wherein a penetration blocking portion (1020) is only formed in a region below the intersecting part of the fin (1004) and the gate stack.
申请公布号 WO2014110853(A1) 申请公布日期 2014.07.24
申请号 WO2013CN71637 申请日期 2013.02.18
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES 发明人 ZHU, HUILONG
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
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