| 发明名称 |
METHODS AND DEVICES FOR FORMING NANOSTRUCTURE MONOLAYERS AND DEVICES INCLUDING SUCH MONOLAYERS |
| 摘要 |
Methods are provided for forming a nanostructure array. An example method includes providing a first layer, providing nanostructures dispersed in a solution comprising a liquid form of a spin-on-dielectric, wherein the nanostructures comprise a silsesquioxane ligand coating, disposing the solution on the first layer, whereby the nanostructures form a monolayer array on the first layer, and curing the liquid form of the spin-on-dielectric to provide a solid form of the spin-on-dielectric. Numerous other aspects are provided. |
| 申请公布号 |
US2014206182(A1) |
申请公布日期 |
2014.07.24 |
| 申请号 |
US201414251092 |
申请日期 |
2014.04.11 |
| 申请人 |
SanDisk Corporation |
发明人 |
Chen Jian;Cruden Karen Chu;Duan Xiangfeng;Liu Chao;Parce J. Wallace |
| 分类号 |
H01L21/28 |
主分类号 |
H01L21/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for forming a nanostructure array, the method comprising:
providing a first layer; providing nanostructures dispersed in a solution comprising a liquid form of a spin-on-dielectric, wherein the nanostructures comprise a silsesquioxane ligand coating; disposing the solution on the first layer, whereby the nanostructures form a monolayer array on the first layer; and curing the liquid form of the spin-on-dielectric to provide a solid form of the spin-on-dielectric. |
| 地址 |
Milpitas CA US |
