COMPLEMENTARY METAL OXIDE HETEROJUNCTION MEMORY DEVICES AND METHODS FOR CYCLING ROBUSTNESS AND DATA RETENTION

摘要

A memory device is disclosed. The memory device comprises a first metal layer and a first metal oxide layer coupled to the first metal layer. The first metal layer is also coupled to a second metal oxide, which in turn is couple to a second metal layer. The formation of the first metal oxide layer may occur in-situ when the first metal oxide layer has a Gibbs free energy that is lower than the Gibbs free energy for the formation of the second metal oxide layer. Control of the oxygen vacancy or ion concentrations of the first metal oxide layer and the second metal oxide layer is utilized in the information and the operation of the memory device. Selection of a dielectric constant and a thickness of the first and second metal oxide layer may be utilized to result in similar electrical field stress across the first metal oxide layer and the second metal oxide layer and improve the cycling robustness and data retention for the memory device.

主权项

1. A memory device comprises:
a first metal layer; a first metal oxide layer coupled to the first metal layer; a second metal oxide layer coupled to the first metal oxide layer wherein a dielectric constant of the first metal oxide is similar to a dielectric constant of the second metal oxide; and a second metal layer coupled to the second metal oxide layer.