WATER REPELLENT FILM MANUFACTURING METHOD, SUBSTRATE, NOZZLE PLATE, INK JET HEAD, AND INK JET RECORDING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a water repellent film having high adhesion to a substrate at low cost.SOLUTION: A water repellent film manufacturing method includes: an adhesion precursor film forming step of forming an adhesion precursor film mainly containing Si-O bonds with hydrogen directly bonding to Si on a substrate; an irradiation step of irradiating the adhesion precursor film with excitation energy to increase OH groups on a surface of the adhesion precursor film so as to convert the adhesion precursor film to an adhesion enhancement film; and an organic film covering step of covering an organic film on the adhesion enhancement film by silane coupling agent. A content of hydrogen directly bonding Si in the adhesion precursor film, if hydrogen is converted to Hmolecules, is equal to or higher than 1.0×10atom/cm.