METHOD TO DYNAMICALLY TUNE PRECISION RESISTANCE

摘要

A precision resistor is formed with a controllable resistance to compensate for variations that occur with temperature. An embodiment includes forming a resistive semiconductive element having a width and a length on a substrate, patterning an electrically conductive line across the width of the resistive semiconductive element, but electrically isolated therefrom, and forming a depletion channel in the resistive semiconductive element under the electrically conductive line to control the resistance value of the resistive semiconductive element. The design enables dynamic adjustment of the resistance, thereby improving the reliability of the resistor or allowing for resistance modification during final packaging.

主权项

1. A resistor comprising:
a resistive semiconductive element having a width and a length patterned in a portion of a polycrystalline gate line over a substrate, wherein the length and/or width of the resistive semiconductive element is less than a length and/or width, respectively, of the polycrystalline gate line; an electrically conductive line across the width of the resistive semiconductive element, but electrically isolated therefrom; and a depletion channel in the resistive semiconductive element under the electrically conductive line to form a resistance in series with the resistive semiconductive element.