发明名称 |
TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK |
摘要 |
An unseasoned substrate support assembly includes a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further includes an upper surface of the ceramic body having a first portion proximate to a center of the upper surface of the ceramic body and having a first roughness profile and a second portion distal from the center of the upper surface of the ceramic body and having a second roughness profile with a lower roughness than the first roughness profile, wherein areas of the first and second portions are based on radial distances from the center of the ceramic body. |
申请公布号 |
WO2014113244(A1) |
申请公布日期 |
2014.07.24 |
申请号 |
WO2014US10561 |
申请日期 |
2014.01.07 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BANDA, SUMANTH;SUN, JENNIFER Y.;BUCHBERGER, DOUGLAS, JR.;NEVIL, SHANE C. |
分类号 |
H01L21/683;H05B3/20 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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