发明名称 |
BASE FILM FOR DICING SHEET AND DICING SHEET |
摘要 |
A base film for a dicing sheet is provided which can suppress dicing debris from generating during the dicing of a cut object without imparting physical energy, such as electron beam or γ ray. The base film for a dicing sheet comprises a resin layer. The resin layer comprises: a norbornene-based resin that is a thermoplastic resin having a norbornene-based compound as at least one type of monomer; and an olefin-based thermoplastic resin other than the norbornene-based resin. The norbornene-based resin in the resin layer has a content of more than 3.0 mass %. A dicing sheet is also provided which comprises: the base film for a dicing sheet; and a pressure-sensitive adhesive layer placed on a surface of the film at the resin layer side. |
申请公布号 |
US2014205835(A1) |
申请公布日期 |
2014.07.24 |
申请号 |
US201214235919 |
申请日期 |
2012.09.05 |
申请人 |
Taya Naoki;Ueda Masashi;Sato Yosuke;Ito Masaharu |
发明人 |
Taya Naoki;Ueda Masashi;Sato Yosuke;Ito Masaharu |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
1. A base film for a dicing sheet, the base film comprising a resin layer, wherein
the resin layer comprises: a norbornene-based resin that is a thermoplastic resin having a norbornene-based compound as at least one type of monomer; and an olefin-based thermoplastic resin other than the norbornene-based resin, and the norbornene-based resin in the resin layer has a content of more than 3.0 mass %. |
地址 |
Itabashi--ku JP |