发明名称 BASE FILM FOR DICING SHEET AND DICING SHEET
摘要 A base film for a dicing sheet is provided which can suppress dicing debris from generating during the dicing of a cut object without imparting physical energy, such as electron beam or γ ray. The base film for a dicing sheet comprises a resin layer. The resin layer comprises: a norbornene-based resin that is a thermoplastic resin having a norbornene-based compound as at least one type of monomer; and an olefin-based thermoplastic resin other than the norbornene-based resin. The norbornene-based resin in the resin layer has a content of more than 3.0 mass %. A dicing sheet is also provided which comprises: the base film for a dicing sheet; and a pressure-sensitive adhesive layer placed on a surface of the film at the resin layer side.
申请公布号 US2014205835(A1) 申请公布日期 2014.07.24
申请号 US201214235919 申请日期 2012.09.05
申请人 Taya Naoki;Ueda Masashi;Sato Yosuke;Ito Masaharu 发明人 Taya Naoki;Ueda Masashi;Sato Yosuke;Ito Masaharu
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项 1. A base film for a dicing sheet, the base film comprising a resin layer, wherein the resin layer comprises: a norbornene-based resin that is a thermoplastic resin having a norbornene-based compound as at least one type of monomer; and an olefin-based thermoplastic resin other than the norbornene-based resin, and the norbornene-based resin in the resin layer has a content of more than 3.0 mass %.
地址 Itabashi--ku JP