ELECTRICAL DEVICE HAVING MOVABLE ELECTRODE

摘要

A movable electric device includes: a first and second fixed electrodes formed on a support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cavity therebetween; a movable member having a movable electrode having a first end disposed near the first fixed electrode and a second end disposed near the second fixed electrode, and bent spring member continuing from at least one of the first and second ends of the movable electrode, and including part which is bent in thickness direction of the movable electrode; and first and second anchors disposed on the support substrate and supporting the movable member at its opposite ends.

主权项

1. A movable electric device comprising:
a support substrate having a surface; first and second fixed electrodes formed on the support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cavity therebetween; a movable member having
a movable electrode having a first end disposed near the first fixed electrode and a second end disposed near the second fixed electrode, andbent spring member continuing from at least one of the first and second ends of the movable electrode, and including part which is bent in thickness direction of the movable electrode; and first and second anchors disposed on the support substrate and supporting the movable member at its opposite ends.