发明名称 SEMICONDUCTOR DEVICES
摘要 Semiconductor devices include a first gate pattern provided on the first active region, a second gate pattern over the first active region, a third gate pattern over the second active region, and a fourth gate pattern over the second active region. The second gate pattern is parallel to the first gate pattern in a first direction. The third gate pattern has an asymmetric shape to the first gate pattern with respect to the first direction, and the fourth gate pattern is parallel to the third gate pattern in the first direction, and has an asymmetric shape to the second gate pattern with respect to the first direction. MOS transistors having good properties may be provided in a narrow horizontal area. The MOS transistors may be used in highly stacked semiconductor devices.
申请公布号 US2014203377(A1) 申请公布日期 2014.07.24
申请号 US201414161867 申请日期 2014.01.23
申请人 Samsung Electronics Co., Ltd. 发明人 SONG Hyun-Seung;KIM Kyung-Eun;PARK Jae-Kyun
分类号 H01L27/02 主分类号 H01L27/02
代理机构 代理人
主权项 1. A semiconductor device, comprising: a substrate including neighboring first and second active regions and a device isolation region between the first and second active regions; a first gate pattern over the first active region; a second gate pattern over the first active region, the second gate pattern being parallel to the first gate pattern in a first direction; a third gate pattern over the second active region, the third gate pattern having an asymmetric shape to the first gate pattern with respect to the first direction; and a fourth gate pattern over the second active region, the fourth gate pattern being parallel to the third gate pattern in the first direction, and having an asymmetric shape to the second gate pattern with respect to the first direction.
地址 Suwon-Si KR