发明名称 EQUIPMENT FOR DEPOSITING ORGANIC MATERIAL
摘要 Equipment for depositing an organic material according to the present invention includes a tray for receiving a substrate therein and transferred by a transferring unit, wherein the tray independently deposits an organic material evaporated from each crucible on the substrate; a sensing unit disposed in the tray and a main body, respectively to sense relative positions of the tray to each crucible through a relative contact scheme; a control unit for controlling an operation of the tray to allow the organic material to be deposited on the substrate according to information about relative positions of the tray to each crucible based on a sensing signal from the sensing unit. Thus, the relative positions of the tray to the crucibles are sensed to deposit the organic material evaporated from the crucibles on the substrate, so that the time taken to perform a process of testing an organic material may be reduced.
申请公布号 KR20140092458(A) 申请公布日期 2014.07.24
申请号 KR20120156679 申请日期 2012.12.28
申请人 LIGADP CO., LTD. 发明人 KIM, YOUNG HAK;KIM, SANG SU;KIM, JEONG HEON;RHO, JUN SEO;AN, JAE GON;LEE, JONG HA
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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