| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component capable of eliminating conduction failure due to a short circuit.SOLUTION: A mirror drive device 1 comprises: a fixed frame; a movable frame 14; a mirror; and a permanent magnet 10. The movable frame 14 has: a base material 100; a drive coil 18; a coating layer 102; and an insulating layer 104. The base material 100 includes a groove 100a located at a main surface S4 side and extending in a spiral shape. The drive coil 18 is composed of a metal material disposed in the groove 100a. The coating layer 102 is composed of a metal material extending to the main surface S4 to cover an opening of the groove 100a and suppressing diffusion of the metal material composing the drive coil 18. The insulating layer 104 is disposed on the main surface S4 and the coating layer 102. A lead-out conductor 28b electrically connected with an inner end of the drive coil 18 crosses three-dimensionally the drive coil 18 via the insulating layer 104. |
