| 摘要 |
Provided herein are electron emission devices and device components for optical, electronic and optoelectronic devices, including cantilever-based MEMS and NEMS instrumentation. Devices of certain aspects of the invention integrate a dielectric, pyroelectric, piezoelectric or ferroelectric film on the receiving surface of a substrate having an integrated actuator, such as a temperature controller or mechanical actuator, optionally in the form of a cantilever device having an integrated heater-thermometer. Also provided are methods of making and using electron emission devices for a range of applications including sensing and imaging technology. |
| 主权项 |
1. An electron emission device comprising:
a substrate having a receiving surface; a dielectric, pyroelectric, piezoelectric or ferroelectric thin film provided on at least a portion of said receiving surface or provided on one or more intermediate structures supported by said receiving surface; wherein said dielectric, pyroelectric, piezoelectric or ferroelectric thin film comprises a crystalline material and has a thickness less than or equal to 10 μm; and an actuator operationally coupled to said dielectric, pyroelectric, piezoelectric or ferroelectric thin film for selectively modulating a state of mechanical strain, a temperature, an applied electric field or a combination of these in said dielectric, pyroelectric, piezoelectric or ferroelectric thin film so as to generate electron emission from an external surface of said dielectric, pyroelectric, piezoelectric or ferroelectric thin film. |
