| 发明名称 |
LASER ANNEALING APPARATUS |
| 摘要 |
A laser annealing apparatus includes a lens unit configured to transmit a laser beam to be irradiated onto an irradiation target; a lens unit housing accommodating the lens unit and having an opening configured to allow the laser beam to pass through the opening; a blocking plate configured to block at least a portion of the laser beam reflected by the irradiation target after being transmitted through the lens unit to the irradiation target; and a cooling unit between the blocking plate and the lens unit housing. |
| 申请公布号 |
US2014202213(A1) |
申请公布日期 |
2014.07.24 |
| 申请号 |
US201313889152 |
申请日期 |
2013.05.07 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
Park Cheol-Ho;Choo Byoung-Kwon;Kim Eun-Cheol;Son Hee-Geun;Yun Jong-Hyun |
| 分类号 |
C01B33/02 |
主分类号 |
C01B33/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser annealing apparatus comprising:
a lens unit configured to transmit a laser beam to be irradiated onto an irradiation target; a lens unit housing accommodating the lens unit and having an opening configured to allow the laser beam to pass through the opening; a blocking plate configured to block at least a portion of the laser beam reflected by the irradiation target after being transmitted through the lens unit to the irradiation target; and a cooling unit between the blocking plate and the lens unit housing. |
| 地址 |
Yongin-City KR |
