| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a non-contact conveyance apparatus which can keep the floatation height with high accuracy even in large FPD or the like and is advantageously usable in process steps.SOLUTION: In a non-contact conveyance apparatus 10, two or more rotational flow forming bodies 1 to 4 which have a fluid jetting port and generates, on the front surface side, an ascending rotational flow moving in the direction of separating from the front surface by jetting a fluid from the fluid jetting port are provided on the conveyance surfaces 7j and 9j of bases 7 and 9, respectively. The bases are provided with holes 8 for fluid suction around the rotational flow forming bodies. A row which consists of rotational flow forming bodies 1 and 3 generating a rotational flow in one direction and holes for fluid suction, arranged alternately along the width direction of the base, and a row which consists of rotational flow forming bodies 2 and 4 generating a rotational flow in the other direction and holes for fluid suction, arranged alternately along the width direction of the base are arranged alternately along the longitudinal direction of the base, and the holes for fluid suction can be positioned between rotational flow forming bodies which are positioned in the width and longitudinal directions of the bases and generate rotational flows in the same direction.</p> |
