| 发明名称 |
LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH |
| 摘要 |
A MEMS switch includes a semiconductor substrate, a movable cantilever and a cantilever anchor. The semiconductor substrate includes a device layer and a handle. The movable cantilever is formed in the semiconductor substrate, and is disposed over a void in the handle. The cantilever anchor is formed in the semiconductor substrate and defines a side wall of the void. A metal portion is formed on at least a portion of the movable cantilever. A metal contact is formed proximate an end of the movable cantilever. A biasing metal contact is formed adjacent the cantilever. The biasing metal contact is electrically disconnected from the metal contact. |
| 申请公布号 |
US2014202837(A1) |
申请公布日期 |
2014.07.24 |
| 申请号 |
US201314019939 |
申请日期 |
2013.09.06 |
| 申请人 |
Purdue Research Foundation |
发明人 |
Fruehling Adam Joseph;Peroulis Dimitrios |
| 分类号 |
H01H59/00;B81C1/00 |
主分类号 |
H01H59/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS switch, comprising:
a semiconductor substrate including a device layer and a handle; a movable cantilever formed in the semiconductor substrate, the cantilever disposed over a void in the handle; a cantilever anchor formed in the semiconductor substrate and defining a side wall of the void; a metal portion formed on at least a portion of the movable cantilever; a metal contact formed proximate an end of the movable cantilever; and a biasing metal contact formed adjacent the cantilever, the biasing metal contact electrically disconnected from the metal contact. |
| 地址 |
West Lafayette IN US |
