PRESSURIZATION DEVICE AND PRESSURIZATION METHOD

摘要

To obtain a pressurization device that can correctly apply pressure to the entire surface of a workpiece, and a pressure problem. A pressurization device (1) is provided with a table (2) provided with a workpiece mounting surface (21), a pressurization head (3) facing the workpiece mounting surface (21), a main pressurization shaft (4) that applies pressure to the center of the pressurization head (3), a plurality of sub-pressurization shafts (5) that apply pressure to the pressurization head (3) around the main pressurization shaft (4), and a control unit (6) that controls conditions of pressures applied by the main pressurization shaft (4) and by the plurality of sub-pressurization shafts (5). Although large loads are applied to the center of a workpiece (10) and small loads are applied to the end parts of the workpiece (10) when the main pressurization shaft (4) applies pressure to the center of the pressurization head (3) from the rear surface side, the loads can be optimally balanced in the center and in the end parts of the workpiece (10) because the plurality of sub-pressurization shafts (5) apply pressure from the rear surface side to the pressurization head (3) around the main pressurization shaft (4).