SUCKING AND LIFTING/LOWERING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sucking and lifting/lowering device capable of delivering a substrate to a sucking plate of a suction inverse device in a simple configuration.SOLUTION: A sucking and lifting/lowering device includes: a horizontal fixing plate 30 mounted on a frame 1; a fluid cylinder 31 which is mounted on the fixing plate 30 and has a piston 31a for performing reciprocating-motion in the vertical direction; and a suction plate 32 fixed to the lower end of the piston 31a. The suction plate 32 includes a plurality of guides 33 which extend vertically upward from the upper surface and slidably penetrate through the fixing plate 30.