RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS AND MOVING OBJECT

摘要

A resonator element has a piezoelectric substrate including a vibration section and a thick section having a thickness which is thicker than that of the vibration section, and a pair of excitation electrodes provided on a surface and aback surface of the vibration section. In addition, the thick section has a second thick section provided along a second outer edge of the vibration section. The second thick section has an outer edge section intersecting with both axes of an X axis and a Z′ axis in an end portion opposite to the fixing section in a plan view of the resonator element.

主权项

1. A resonator element comprising:
a substrate that includes a first region having a vibration region which is vibrated in thickness-shear vibration and a second region integrally formed with the first region, and which has a thickness which is thicker than that of the first region; and excitation electrodes that are respectively provided in a first main surface and a second main surface of the vibration region which have a front and back relationship with each other, wherein the second region includes: a first thick section in which a fixing section to which an object is attached is disposed; and a second thick section that is connected to the first thick section, and wherein the second thick section includes: outer edge sections that intersect with respect to a vibration direction of the thickness-shear vibration and a direction orthogonal to the vibration direction of the thickness-shear vibration in an end portion opposite to the side of the fixing section in a plan view.