MANUFACTURING METHOD OF CYLINDRICAL PIEZOELECTRIC ELEMENT, CYLINDRICAL PIEZOELECTRIC ELEMENT, AND MINUTE DRIVE MECHANISM

摘要

In manufacturing method of a cylindrical piezoelectric element, a cylindrical piezoelectric material is formed by molding a piezoelectric material into a cylindrical shape and subjecting the molded piezoelectric material to calcination. A reference electrode is provided on an inner circumferential surface of the cylindrical piezoelectric material. Drive electrodes are provided in a circumferential direction so that the drive electrodes are extending in an axial direction from one end to the other end on an outer circumferential surface. A polarization electrode is provided at a part of the circumferential surface in the vicinity of the one end. A predetermined voltage is applied between the polarization electrode and the reference electrode. The polarization electrode is removed from the cylindrical piezoelectric material.

主权项

1. A manufacturing method of a cylindrical piezoelectric element, comprising:
creating a cylindrical piezoelectric material formed by molding a piezoelectric material into a cylindrical shape and by subjecting the molded piezoelectric material to calcination; providing a reference electrode on an inner circumferential surface of the cylindrical piezoelectric material; providing a plurality of drive electrodes with a predetermined width in a circumferential direction and the drive electrodes extending in an axial direction from one end to the other end on an outer circumferential surface of the cylindrical piezoelectric material; providing a polarization electrode at a part of the circumferential surface of the cylindrical piezoelectric material in a vicinity of one end of the cylindrical piezoelectric material in the axial direction in an aspect in which the polarization electrode is electrically connected in series with each of the plurality of drive electrodes in the axial direction; applying a predetermined voltage between the polarization electrode and the reference electrode to polarize areas of the cylindrical piezoelectric material corresponding to the plurality of drive electrodes; and removing the polarization electrode from the cylindrical piezoelectric material.