| 摘要 |
The present invention relates to a linear evaporation source including a mixing zone for uniformly mixing evaporation materials and preventing spitting which comprises: a crucible for receiving evaporation materials; an induction pipe formed to communicate with the crucible; a distribution pipe having a plurality of nozzles or distribution holes provided on the upper part to communicate with the induction pipe; and a mixing zone provided between the induction pipe and the distribution pipe to mix the plurality of evaporation materials. When co-deposition occurs by using the plurality of evaporation materials, the evaporation materials are uniformly mixed through the mixing zone, a number of sources can be saved, and spitting can be prevented. |
