SILICON COMPOUND CONTAINING HEXAFLUOROISOPROPANOL GROUPS, METHOD FOR PRODUCING SAME, AND POLYMER COMPOUND OBTAINED BY POLYMERIZING SAME

摘要

[Problem] To provide a polysiloxane polymer compound containing HFIP groups, wherein the polysiloxane polymer compound has solubility in an alkali developer and excellent heat resistance, and to provide an HFIP group-containing silicon compound as a precursor thereof. [Solution] A silicon compound represented by general formula (1) (in the formula, R1 is a hydrogen atom, a linear alkyl group having 1-10 carbon atoms, a branched alkyl group having 3-10 carbon atoms, a cyclic alkyl group having 3-10 carbon atoms, a linear alkenyl group having 2-10 carbon atoms, a branched alkenyl group having 3-10 carbon atoms, a cyclic alkenyl group having 3-10 carbon atoms, or an aryl group having 6-10 carbon atoms, and some or all of the hydrogen atoms in the alkyl groups, alkenyl groups, or aryl groups may be substituted by fluorine atoms; R2 are each independently a linear alkyl group having 1-4 carbon atoms or a branched alkyl group having 3 or 4 carbon atoms; a is an integer of 1-5, aa is an integer of 1-3, m is an integer of 0-2, n is an integer of 1-3, and aa + m + n = 4) and a polymer compound obtained by polymerizing the same.