发明名称 A Etching Mask for Manufacturing Soluble OLED and Etching Method thereof
摘要 The present invention relates to an etching mask for encapsulation to manufacture a soluble OLED and an encapsulating method thereof. The mask of the present invention comprises a unit mask on which a mask pattern that partially opens a surrounding area except an effective area is formed; a mask substrates on which a plurality of unit masks are separately arranged to have a distance from each other; and a gap adjusting means arranged on one surface of the mask substrate to form a gap between the mask and the substrate. According to the present invention, the mask having a bisected mask pattern is used, instead of a photolithography process, to perform a dry etching process, and thus processing time is significantly reduced. Manufacturing processes are performed in a vacuum condition, and thus influences on a life span of a device can be minimized.
申请公布号 KR101422534(B1) 申请公布日期 2014.07.24
申请号 KR20120150722 申请日期 2012.12.21
申请人 发明人
分类号 H01L51/56;H05B33/04;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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