发明名称 DETECTION DEVICE, WAFER AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To detect process variations of a plurality of comparators at high speed with high precision.SOLUTION: A detection device detects process variations of a plurality of comparators for outputting a comparison result obtained by comparing a signal level of an input signal with a reference level. The detection device includes: a signal input portion for inputting a common input signal and a common reference level in the plurality of comparators, and sequentially changing the signal level of the input signal; and a detecting portion for detecting a number of comparison results indicating a predetermined result among the comparison results of the plurality of comparators about each signal level, and detecting the process variations on the basis of a distribution of a number of the comparison results.
申请公布号 JP2014134498(A) 申请公布日期 2014.07.24
申请号 JP20130003604 申请日期 2013.01.11
申请人 ADVANTEST CORP;UNIV OF TOKYO 发明人 YAMAGUCHI TAKAHIRO;KOMATSU SATOSHI;ASADA KUNIHIRO;JAMES SUMIT TANDON
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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