发明名称 |
DETECTION DEVICE, WAFER AND ELECTRONIC DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To detect process variations of a plurality of comparators at high speed with high precision.SOLUTION: A detection device detects process variations of a plurality of comparators for outputting a comparison result obtained by comparing a signal level of an input signal with a reference level. The detection device includes: a signal input portion for inputting a common input signal and a common reference level in the plurality of comparators, and sequentially changing the signal level of the input signal; and a detecting portion for detecting a number of comparison results indicating a predetermined result among the comparison results of the plurality of comparators about each signal level, and detecting the process variations on the basis of a distribution of a number of the comparison results. |
申请公布号 |
JP2014134498(A) |
申请公布日期 |
2014.07.24 |
申请号 |
JP20130003604 |
申请日期 |
2013.01.11 |
申请人 |
ADVANTEST CORP;UNIV OF TOKYO |
发明人 |
YAMAGUCHI TAKAHIRO;KOMATSU SATOSHI;ASADA KUNIHIRO;JAMES SUMIT TANDON |
分类号 |
G01R31/28;H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|