发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To decrease the thickness of a semiconductor integrated circuit which is highly integrated.SOLUTION: The present invention relates to a semiconductor device and a method of manufacturing the semiconductor device, the method comprising the steps of: forming a first semiconductor element layer connected to a first bump, a first structure having a first sheet-like fiber body and a first organic resin, and a first through electrode penetrating the first structure on a substrate; forming a second semiconductor element layer connected to a second bump and a second structure having a second sheet-like fiber body and a second organic resin; forming a third through electrode penetrating a third structure by disposing a conductive resin having metal particles on an uncured third organic resin in a third structure having a third sheet-like fiber body and a third organic resin so that the uncured third organic resin is dissolved and the metal particles move in the third sheet-like fiber body; disposing the first through electrode, the third through electrode, and the second bump so as to overlap with each other on the substrate; and curing the third organic resin.</p>
申请公布号 JP2014135516(A) 申请公布日期 2014.07.24
申请号 JP20140079887 申请日期 2014.04.09
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 SENDA AKIHIRO
分类号 H01L25/065;H01L25/07;H01L25/18 主分类号 H01L25/065
代理机构 代理人
主权项
地址