| 摘要 |
<p>A vibrating mirror element (1; 201; 301; 401; 501) includes a mirror portion (11; 511) that reflects light and is tiltable around a rotational axis (A), a tiltable frame portion (12, 13; 212; 512, 513) connected to a mirror end portion (11a, 11b; 511c, 511d, 511e, 511f) of the mirror portion (11; 511) at a position on an intersecting line (B; D, E) that intersects with the rotational axis (A), a driving portion (16, 17; 216, 217) including a piezoelectric element (3b) configured to deform through application of a voltage, and a connecting portion (14, 15; 214, 215; 314, 315) configured to connect the tiltable frame portion (12, 13; 212; 512, 513) and the driving portion (16, 17; 216, 217) and tiltable through deformation of the piezoelectric element (3b) of the driving portion (16, 17; 216, 217). The tiltable frame portion (12, 13; 212; 512, 513) can be tilted by tilting the connecting portion (14, 15; 214, 215; 314, 315), and the mirror portion (11; 511) can be tilted by tilting the tiltable frame portion (12, 13; 212; 512, 513).</p> |
