发明名称 |
CRACK-RESISTANT THERMAL BEND ACTUATOR |
摘要 |
A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer. |
申请公布号 |
EP2490896(A4) |
申请公布日期 |
2014.07.23 |
申请号 |
EP20090848585 |
申请日期 |
2009.08.25 |
申请人 |
ZAMTEC LIMITED |
发明人 |
MCAVOY, GREGORY JOHN;LAWLOR, VINCENT PATRICK;O'REILLY, RONAN PADRAIG SEAN |
分类号 |
B41J2/14 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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