TEMPERATURE CONTROL UNIT, SUBSTRATE MOUNTING TABLE, SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL SYSTEM AND SUBSTRATE PROCESSING METHOD

摘要

The invention provides a temperature control unit capable of making a substrate change temperature rapidly. A temperature control unit (15) which is contacted with the substrate (W) and controls the temperature of the substrate (W) comprises a tabular unit main body (16) contacted with the substrate (W), a plurality of straight line heaters (17) embedded in the unit main body (16) and a cooling flow passage (18) which is formed in the unit main body (16) and flows a medium with a prescribed temperature therein. The heaters (17) are arranged in parallel with each other; and the cooling flow passage is disposed in a portion between two adjacent heaters (17). The heaters (17) and the cooling flow passage (18) are evenly configured alternately seen from a direction vertical to one heater (17) when unit main body (16) is overlooked.