SCRIBING APPARATUS AND METHOD

摘要

Provided are a scribing apparatus and a scribing method capable of forming a deep vertical crack without damage to a brittle material substrate W such as a hard glass substrate. The scribing apparatus of the present invention includes: a scribing wheel 34 having a circumference ridge line 62 formed of crossed bottom parts of two cone frustums sharing a rotational axis 60, a plurality of notches 64 and projections 65 being formed alternately in a circumferential direction along the circumference ridge line 62, each of the projections 65 being a part of the circumference ridge line 62 remaining after notching the circumference ridge line 62 and having a length in the circumferential direction, and each of the notches having a length a in the circumferential direction being shorter than the length b of the projection in the circumferential direction; a scribe head 24 having a vibration actuator 35 for vibrating the scribing wheel 34 in a direction crossing a surface of the brittle material substrate W; and a moving mechanism 25 for moving the scribe head 24 along the surface of the brittle material substrate W.