| 摘要 |
The present invention provides a perfluoride decomposition treatment method and treatment device with which it is possible to prevent corrosion of heat exchanger piping, reduce the amount of wastewater, and very efficiently recover calcium fluoride of a high purity with good energy efficiency. Furthermore, the present invention provides a perfluoride treatment device that is efficient and requires little equipment or space. By means of the present invention, an exhaust gas containing a perfluoride and water or steam are fed to a heat exchanger 2, preheated by heat exchange with a high-temperature decomposed gas, further heated, and decomposed by a catalyst 12. The decomposed gas containing hydrogen fluoride gas is cooled by the heat exchanger 2 and then the hydrogen fluoride gas is reacted with a calcium salt inside an acidic gas removal device 31 to obtain calcium fluoride of a high purity. The feeding and emission of the calcium salt are controlled based on the calcium fluoride concentration in the emissions from the acidic gas removal device and the temperature of the calcium inside the device. |
