发明名称
摘要 A positive resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under the action of acid and an acid-generator component (B) which generates acid upon exposure, wherein the acid-generator component (B) includes an acid generator (B1) containing a compound represented by general formula (b1-1) shown below (wherein Z+ represents an organic cation).
申请公布号 JP5557657(B2) 申请公布日期 2014.07.23
申请号 JP20100196761 申请日期 2010.09.02
申请人 发明人
分类号 G03F7/004;C07D309/30;C07D327/04;C07D333/46;C07D333/52;C07D333/76;C07D335/02;C07D335/16;C07D493/18;C08F220/28;C09K3/00;G03F7/039 主分类号 G03F7/004
代理机构 代理人
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