| 摘要 |
Image recognition on a substrate can be carried out by a plurality of cameras fixedly disposed on the main body of a device and coordinates on the substrate are made detectable. Images of a plurality of alignment markers (201, 202) on a substrate mounted on a substrate support stage (4) are picked up by cameras (8-10) and the substrate support stage (4) is moved by a substrate support stage moving means based on a result of the picked-up images so as to adjust the alignment of the substrate. The cameras are comprised of at least one camera (8, 9) fixedly disposed on the main body (2) of a device that is arranged at the outside of a movable range of a head module (3) in the vector direction (the Y direction) of a first linear moving means and at least one camera (10) fixedly disposed on the main body (2) that is arranged at the outside of the movable range of the head module (3) in the vector direction (the X direction) of a second linear moving means. |
