发明名称 Evaporator cell, coating device and method for evaporating an evaporation material
摘要 The evaporator cell comprises a first crucible (10) having a crucible wall. The first crucible is adapted for receiving an evaporation material and evaporation of the evaporation material. The crucible wall has through openings. The evaporator cell further comprises regularly or irregularly distributed cavities including forms, pores, cracks, channels and slots, and a second crucible (20) arranged in the first crucible. The crucible wall is a single layer formed of multiple layers. The evaporator cell comprises a first crucible (10) having a crucible wall. The first crucible is adapted for receiving an evaporation material and evaporation of the evaporation material. The crucible wall has through openings (12). The evaporator cell further comprises regularly or irregularly distributed cavities including forms, pores, cracks, channels and slots, and a second crucible (20) arranged in the first crucible. The crucible wall is a single layer formed of multiple layers. The cavities have a characteristic dimension such that molten evaporation material is held under the effect of surface tension in the cavities. The slots are arranged offset relative to one another in axial and/or radial direction of the crucible wall. The wall of the crucible comprises wall materials comprising wire, slotted sheet, sintered material and foam. A gap is formed between the first crucible and the second crucible for the exit of evaporation material from the first crucible as vapor for a time. The first and second crucibles are detachably spaced from each other, and have a cylindrical and/or a conical shape. An independent claim is included for method for evaporation of an evaporation material.
申请公布号 EP2733234(A3) 申请公布日期 2014.07.23
申请号 EP20130005168 申请日期 2013.10.31
申请人 CREATEC FISCHER & CO. GMBH 发明人 BRAUN, WOLFGANG
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址