发明名称 IONIZED GAS DETECTOR AND IONIZED GAS DETECTION METHOD
摘要 An ionized gas detector and an ionize gas detecting method are provided, which measure an ion current for positive and negative ions by detecting the ion current in a simple structure, thereby detects the concentration of a measuring-subject gas. The detector and method do not receive the effect of DC drift caused by a DC voltage applying method, and do not lose detection sensitivity even if electrodes are contaminated (even if insulate electrodes are used). An ionized gas detector (10) includes at least a pair of ion detecting electrodes (12) that detect ions of the ionized measuring-subject gas, an electrode-voltage applying means (14) that applies a given voltage to the ion detecting electrodes (12), the electrode-voltage applying means (14) being configured to be capable of reversing its voltage polarity, a charge amplifier circuit (16) having a charge capacitor (18) that accumulates electric charges generated by voltage application by the electrode-voltage applying means (14), an ion current calculating means (22) that calculates the value of an ion current of ions of the measuring-subject gas, based on a time-dependent change of the volume of electric charges accumulated in the charge capacitor (18) of the charge amplifier circuit (16), a concentration determining means (24) that determines the concentration of the measuring-subject gas, based on an ion current value calculated by the ion current calculating means (22), and a voltage polarity control means (26) that reverses the polarity of the electrode-voltage applying means (14) according to the volume of electric charges accumulated in the charge capacitor (18) of the charge amplifier circuit (16).
申请公布号 EP2757573(A1) 申请公布日期 2014.07.23
申请号 EP20120831773 申请日期 2012.06.21
申请人 TOKYO METROPOLITAN INDUSTRIAL TECHNOLOGY RESEARCHINSTITUTE 发明人 HARAMOTO, YOSHIAKI;HIRANO, YASUYUKI;YOSHIDA, HIROMICHI
分类号 H01J47/02;G01N27/64;G01N27/66;G01N27/70 主分类号 H01J47/02
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