| 摘要 |
This document discusses, among other things, apparatus and methods for quadrature cancellation of sense information from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus (200) can include a drive charge-to-voltage C2V converter (202) configured to provide drive information of a proof mass of a MEMS gyroscope, a sense C2V converter (203) configured to provide sense information of the proof mass, a phase-shift module (205) configured to provide phase shift information of the drive information, a drive demodulator (210) configured to receive the drive information and the phase shift information and to provide demodulated drive information, a sense demodulator (211) configured to receive the sense information and the phase shift information and to provide demodulated sense information, and wherein the quadrature correction apparatus (200) is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information. |
