| 摘要 |
PROBLEM TO BE SOLVED: To provide a structural analysis method capable of accurately performing a structural analysis of an analyzed element even when a measured sample contains only a small quantity of the analyzed element. SOLUTION: A structural analysis method includes the following processes. First, a standard sample and a secondary sample are prepared. The standard sample is used to obtain X-ray absorption spectrum regarding an analyzed element. The secondary sample contains, in a matrix thereof, 0.1 to 10 times the amount of the analyzed element as the measured sample. Subsequently, the X-ray absorption spectrum of the standard sample (a standard spectrum) and the X-ray absorption spectrum of the secondary sample (a secondary spectrum) are compared to determine a region of interest which is an energy region of fluorescent X-ray related to the analyzed element in the measured sample. Then, based on the determined region of interest, a target X-ray absorption spectrum of the measured sample is obtained. COPYRIGHT: (C)2012,JPO&INPIT |
