发明名称 |
Method for the preparation of a multi-layered crystalline structure |
摘要 |
<p>This invention generally relates to a process for making a multi-layered crystalline structure. The process includes implanting ions into a donor structure, bonding the implanted donor structure to a second structure to form a bonded structure, cleaving the bonded structure, and removing any residual portion of the donor structure from the finished multi-layered crystalline structure.
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申请公布号 |
EP2733735(A3) |
申请公布日期 |
2014.07.23 |
申请号 |
EP20140154849 |
申请日期 |
2010.12.22 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
WITTE, DALE A.;LIBBERT, JEFFREY L. |
分类号 |
H01L21/762 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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