CAPACITIVE DISPLACEMENT TRANSDUCER FOR A WEAK-MOTION INERTIAL SENSOR

摘要

A capacitive displacement transducer for use in a weak-motion inertial sensor having a frame, a movable inertial mass, a forcing transducer and a flexure. The transducer includes a stationary conductive plate connectable to the frame and a movable conductive plate connectable to the inertial mass in a substantially parallel arrangement. At least one of the stationary and movable conductive plates has a plurality of apertures yielding a conductive plate with apertures and a second conductive plate. The capacitively effective area of the conductive plate with apertures comprises a subset of the total area that overlaps and is physically near the second conductive plate.