Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method

摘要

A system includes a plurality of optical elements, a deformation unit configured to deform a deformable optical element satisfying a following conditional formula included in the plurality of optical elements by applying a force to the deformable optical element:
0.75where EA0 represents an effective aperture of each of the plurality of optical elements and EA represents an axial light flux diameter of each of the plurality of optical elements, and a control unit configured to control the deformation unit, wherein n positions on an outer circumference of the deformable optical element are fixed, the deformation unit includes n actuators, the n actuators apply forces to n positions on the outer circumference other than the fixed n positions, and the control unit controls each of the n actuators independently.

主权项

1. A system comprising:
a plurality of optical elements; a deformation unit configured to deform a deformable optical element satisfying a following conditional formula included in the plurality of optical elements by applying a force to the deformable optical element:
0.75 a control unit configured to control the deformation unit, wherein n positions on an outer circumference of the deformable optical element are fixed, wherein the deformation unit includes n actuators, wherein the n actuators apply forces to other n positions on the outer circumference, wherein the n actuators apply different forces to the deformable optical element, wherein the control unit reduces an aberration that depends on an image height of the system and an aberration that does not depend on the image height of the system at the same time by deforming the deformable optical element by using the deformation unit, and wherein the control unit is configured to determine a force to be applied to the deformable optical element by the n actuators according to an amount of an aberration component dependent on an image height.