Substrate for mounting semiconductor, semiconductor device and method for manufacturing semiconductor device

摘要

A substrate for mounting a semiconductor includes a first insulation layer having first and second surfaces on the opposite sides and having a penetrating hole penetrating through the first insulation layer, an electrode formed in the penetrating hole in the first insulation layer and having a protruding portion protruding from the second surface of the first insulation layer, a first conductive pattern formed on the first surface of the first insulation layer and connected to the electrode, a second insulation layer formed on the first surface of the first insulation layer and the first conductive pattern and having a penetrating hole penetrating through the second insulating layer, a second conductive pattern formed on the second insulation layer and for mounting a semiconductor element, and a via conductor formed in the penetrating hole in the second insulation layer and connecting the first and second conductive patterns.

主权项

1. A method for manufacturing a semiconductor device, comprising:
providing a support member; forming a removable layer on the support member; forming a first insulation layer on the removable layer; forming a penetrating hole which penetrates through the first insulation layer and reaches at least an intermediate point of the removable layer; forming a first conductive pattern on the first insulation layer; filling a plating material in the penetrating hole such that an electrode having a protruding portion protruding from a surface of the first insulation layer toward the intermediate point of the removable layer is formed in the penetrating hole; forming a second insulation layer on the first insulation layer such that the first conductive pattern is covered by the second insulation layer; forming on the second insulation layer a second conductive pattern configured to mount a semiconductor element; mounting a semiconductor element on the second conductive pattern; separating the support member from a structure comprising the removable layer, the first insulation layer, the first conductive pattern, the electrode, the second insulation layer, the second conductive pattern and the semiconductor element; and removing the removable layer from the first insulation layer such that the protruding portion of the electrode protrudes from the surface of the first insulation layer.