Phased array antenna module and method of making same

摘要

A phased array antenna includes a semiconductor wafer, with radio frequency (RF) circuitry fabricated on top side of the semiconductor wafer. There is an array of antenna elements above the top side of the semiconductor wafer, and a coaxial coupling arrangement coupling the RF circuitry and the array of antenna elements. The coaxial coupling arrangement may include a plurality of coaxial connections, each having an outer conductor, an inner conductor, and a dielectric material therebetween. The dielectric material may be air.

主权项

1. A phased array antenna comprising:
a semiconductor wafer; circuitry fabricated on a top side of said semiconductor wafer; an array of phased array antenna elements above the top side of said semiconductor wafer; and a coaxial coupling arrangement coupling said circuitry to said array of phased array antenna elements.