Crystal silicon film forming method, thin-film transistor and display device using the crystal silicon film

摘要

A crystal silicon film forming method according to the present invention includes: forming a metal film; forming an insulating film on the metal film, and forming a crystal silicon film made of polycrystal Si on the insulating film. In the forming of an insulating film, the insulating film is formed within a film thickness range of 160 nm to 190 nm. The forming of a crystal silicon film includes forming an amorphous silicon film made of a-Si on the insulating film, within a film thickness range of 30 nm to 45 nm, and forming the crystal silicon film from the amorphous silicon film by irradiating the amorphous silicon film with a light of a green laser.

主权项

1. A crystal silicon film forming method comprising:
forming a metal film above an insulating substrate including glass, the metal film being made of a refractory metal or alloy both of which include Mo or MoW; forming an insulating film on the metal film; and forming a crystal silicon film on the insulating film, the silicon film being made of polycrystal Si, wherein in the forming of an insulating film, the insulating film is formed within a film thickness range of 50 nm to 250 nm, the forming of a crystal silicon film includes:
forming an amorphous silicon film made of a-Si on the insulating film, within a film thickness range of 20 nm to 80 nm; andforming the crystal silicon film from the amorphous silicon film by irradiating the amorphous silicon film with a light of a green laser such that:
a first light component is absorbed by the amorphous silicon film when the amorphous silicon film is irradiated with the light of the green laser;a first reflected light component is reflected off the metal film when the light of the green laser passes through the amorphous silicon film and the insulating film; anda second light component is absorbed by the amorphous silicon film when the light of the green laser passes through the amorphous silicon film and multiple beam interference occurs between the light and a second reflected light component reflected that is reflected off an interface of the amorphous silicon film and the insulating film, and the sum of (i) an absolute value of a value obtained by partially differentiating, with respect to a film thickness of the insulating film, an absorptance of the amorphous silicon film regarding the second light component and (ii) an absolute value of a value obtained by partially differentiating, with respect to a film thickness of the amorphous film, the absorptance of the amorphous silicon film regarding the second light component, is within a range of 0.0000 to 0.0050.