发明名称 |
COMPOSITE SUBSTRATE, AND METHOD FOR THE PRODUCTION OF A COMPOSITE SUBSTRATE |
摘要 |
A composite substrate (1) comprising a substrate body (2) and a utility layer (31) fixed on the substrate body (2). A planarization layer (4) is arranged between the utility layer (31) and the substrate body (2). A method for producing a composite substrate (1) applies a planarization layer (4) on a provided utility substrate (3). The utility substrate (3) is fixed on a substrate body (2) for the composite substrate (1). The utility substrate (3) is subsequently separated, wherein a utility layer (31) of the utility substrate (3) remains for the composite substrate (1) on the substrate body (2). |
申请公布号 |
KR101422300(B1) |
申请公布日期 |
2014.07.22 |
申请号 |
KR20087028643 |
申请日期 |
2007.04.20 |
申请人 |
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发明人 |
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分类号 |
H01L21/20;H01L21/762;H01L31/0248;H01L33/00 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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