发明名称 COMPOSITE SUBSTRATE, AND METHOD FOR THE PRODUCTION OF A COMPOSITE SUBSTRATE
摘要 A composite substrate (1) comprising a substrate body (2) and a utility layer (31) fixed on the substrate body (2). A planarization layer (4) is arranged between the utility layer (31) and the substrate body (2). A method for producing a composite substrate (1) applies a planarization layer (4) on a provided utility substrate (3). The utility substrate (3) is fixed on a substrate body (2) for the composite substrate (1). The utility substrate (3) is subsequently separated, wherein a utility layer (31) of the utility substrate (3) remains for the composite substrate (1) on the substrate body (2).
申请公布号 KR101422300(B1) 申请公布日期 2014.07.22
申请号 KR20087028643 申请日期 2007.04.20
申请人 发明人
分类号 H01L21/20;H01L21/762;H01L31/0248;H01L33/00 主分类号 H01L21/20
代理机构 代理人
主权项
地址